Tianjun Li, Ludovic Bellon, EPL 98, 14004 (2012)
doi: 10.1209/0295-5075/98/14004
In this letter, we characterize the internal dissipation of coated micro-cantilevers through their mechanical thermal noise. Using a home-made interferometric setup, we achieve a resolution down to 10-14 m/rtHz in the measurement of their deflection. With the use of the fluctuation dissipation theorem and of the Kramers-Kronig relations, we rebuilt the full mechanical response function from the measured noise spectrum, and investigate frequency dependent dissipation as a function of the air pressure and of the nature of the metallic coatings. Using different thicknesses of gold coatings, we demonstrate that the internal viscoelastic damping is solely due to the dissipation in the bulk of the coating.