P. Paolino and L. Bellon, poster presented in the 9ème forum des microscopies à sonde locale, Autrans, France 27-31 mars 2006.
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We present an interferometric setup to measure the deflection of an AFM cantilever. Based on an quadrature phase scheme, its sensitivity is always optimal and its noise level down to 2E-14 m/root(Hz).
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